Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6616717 | Composition and method for polishing in metal CMP | Vikas Sachan, Elizabeth A. (Kegerise) Langlois, Qianqiu (Christine) Ye, Keith G. Pierce, Craig Lack +3 more | 2003-09-09 |
| 6602112 | Dissolution of metal particles produced by polishing | Tony Quan Tran, Vikas Sachan, Terence M. Thomas, Craig Lack, Peter A. Burke | 2003-08-05 |