Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6616717 | Composition and method for polishing in metal CMP | Vikas Sachan, Qianqiu (Christine) Ye, Keith G. Pierce, Craig Lack, Terence M. Thomas +3 more | 2003-09-09 |
| 6561891 | Eliminating air pockets under a polished pad | Stanley E. Eppert, Jr., Adam W. Manzonie, Peter W. Freeman | 2003-05-13 |