Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6648733 | Polishing pads and methods relating thereto | John V. H. Roberts, Lee Melbourne Cook, Ronald D. Bakule | 2003-11-18 |
| 6582283 | Polishing pads for chemical mechanical planarization | Arun Vishwanathan, Lee Melbourne Cook, Peter A. Burke, David Shidner | 2003-06-24 |
| 6530539 | Internal fluid cooled window assembly | Lee M. Goldman, Steven R. Collins, David M. Blanchard, Steven E. Wirth | 2003-03-11 |
| 6518188 | Apparatus and methods for chemical-mechanical polishing of semiconductor wafers | Lee Melbourne Cook, William D. Budinger | 2003-02-11 |