Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6562651 | Method of manufacturing a semiconductor device having contact pads | Kyeong-Koo Chi, Jung-Sik Jeon | 2003-05-13 |
| 6537876 | Method of manufacturing a semiconductor capacitor having a hemispherical grain layer using a dry cleaning process | Kyu-hwan Chang, Young Min Kwon, Sang-lock Hah | 2003-03-25 |
| 6534921 | Method for removing residual metal-containing polymer material and ion implanted photoresist in atmospheric downstream plasma jet system | Sang-Hun Seo, Kyeong-Koo Chi, Ji Soo Kim, Chang-Woong Chu | 2003-03-18 |
| 6513538 | Method of removing contaminants from integrated circuit substrates using cleaning solutions | Kyu-hwan Chang, Young Min Kwon, Sang-lock Hah | 2003-02-04 |