Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635582 | Method of manufacturing semiconductor device | Cheol-Ju Yun, Heung-Soo Park | 2003-10-21 |
| 6565736 | WET PROCESS FOR SEMICONDUCTOR DEVICE FABRICATION USING ANODE WATER CONTAINING OXIDATIVE SUBSTANCES AND CATHODE WATER CONTAINING REDUCTIVE SUBSTANCES, AND ANODE WATER AND CATHODE WATER USED IN THE WET PROCESS | Im-Soo Park, Kun-Tack Lee, Sang-rok Hah, Woo-Gwan Shim, Hyung-Ho Ko | 2003-05-20 |
| 6537876 | Method of manufacturing a semiconductor capacitor having a hemispherical grain layer using a dry cleaning process | Seung-Pil Chung, Kyu-hwan Chang, Sang-lock Hah | 2003-03-25 |
| 6513538 | Method of removing contaminants from integrated circuit substrates using cleaning solutions | Seung-Pil Chung, Kyu-hwan Chang, Sang-lock Hah | 2003-02-04 |