Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6537876 | Method of manufacturing a semiconductor capacitor having a hemispherical grain layer using a dry cleaning process | Seung-Pil Chung, Kyu-hwan Chang, Young Min Kwon | 2003-03-25 |
| 6513538 | Method of removing contaminants from integrated circuit substrates using cleaning solutions | Seung-Pil Chung, Kyu-hwan Chang, Young Min Kwon | 2003-02-04 |