Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6638855 | Method of filling contact hole of semiconductor device | Yong-Sun Ko, Chang-Lyong Song, Seung-pil Chong | 2003-10-28 |
| 6607654 | Copper-plating elecrolyte containing polyvinylpyrrolidone and method for forming a copper interconnect | Sun Jung Lee, Hyeon-Deok Lee | 2003-08-19 |
| 6537876 | Method of manufacturing a semiconductor capacitor having a hemispherical grain layer using a dry cleaning process | Seung-Pil Chung, Young Min Kwon, Sang-lock Hah | 2003-03-25 |
| 6513538 | Method of removing contaminants from integrated circuit substrates using cleaning solutions | Seung-Pil Chung, Young Min Kwon, Sang-lock Hah | 2003-02-04 |