Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6534921 | Method for removing residual metal-containing polymer material and ion implanted photoresist in atmospheric downstream plasma jet system | Kyeong-Koo Chi, Ji Soo Kim, Chang-Woong Chu, Seung-Pil Chung | 2003-03-18 |