Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6657192 | Method of determining degree of charge-up induced by plasma used for manufacturing semiconductor device and apparatus therefor | Wan Jae Park, Kyoung-Sub Shin | 2003-12-02 |
| 6617253 | Plasma etching method using polymer deposition and method of forming contact hole using the plasma etching method | Chang-Woong Chu, Tae-hyuk Ahn, Sang-Sup Jeong | 2003-09-09 |
| 6573168 | Methods for forming conductive contact body for integrated circuits using dummy dielectric layer | Chang-Woong Chu, Dong Hyun Kim, Yong-Chul Oh, Hyoung Joon Kim, Byeong-yun Nam +2 more | 2003-06-03 |
| 6545306 | Semiconductor memory device with a connector for a lower electrode or a bit line | Jeong Seok Kim, Kyoung-Sub Shin | 2003-04-08 |
| 6534921 | Method for removing residual metal-containing polymer material and ion implanted photoresist in atmospheric downstream plasma jet system | Sang-Hun Seo, Kyeong-Koo Chi, Chang-Woong Chu, Seung-Pil Chung | 2003-03-18 |