Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653228 | Method for preparing semiconductor including formation of contact hole using difluoromethane gas | Sung-Gil Choi | 2003-11-25 |
| 6617253 | Plasma etching method using polymer deposition and method of forming contact hole using the plasma etching method | Chang-Woong Chu, Sang-Sup Jeong, Ji Soo Kim | 2003-09-09 |
| 6573551 | Semiconductor memory device having self-aligned contact and fabricating method thereof | Myeong-Cheol Kim, Byeong-yun Nam, Sang-Sup Jeong | 2003-06-03 |
| 6573602 | Semiconductor device with a self-aligned contact and a method of manufacturing the same | Jun Seo, Myeong-Cheol Kim | 2003-06-03 |