Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617253 | Plasma etching method using polymer deposition and method of forming contact hole using the plasma etching method | Chang-Woong Chu, Tae-hyuk Ahn, Ji Soo Kim | 2003-09-09 |
| 6573551 | Semiconductor memory device having self-aligned contact and fabricating method thereof | Myeong-Cheol Kim, Byeong-yun Nam, Tae-hyuk Ahn | 2003-06-03 |