Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617253 | Plasma etching method using polymer deposition and method of forming contact hole using the plasma etching method | Tae-hyuk Ahn, Sang-Sup Jeong, Ji Soo Kim | 2003-09-09 |
| 6573168 | Methods for forming conductive contact body for integrated circuits using dummy dielectric layer | Ji Soo Kim, Dong Hyun Kim, Yong-Chul Oh, Hyoung Joon Kim, Byeong-yun Nam +2 more | 2003-06-03 |
| 6534921 | Method for removing residual metal-containing polymer material and ion implanted photoresist in atmospheric downstream plasma jet system | Sang-Hun Seo, Kyeong-Koo Chi, Ji Soo Kim, Seung-Pil Chung | 2003-03-18 |