Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6573168 | Methods for forming conductive contact body for integrated circuits using dummy dielectric layer | Ji Soo Kim, Chang-Woong Chu, Dong Hyun Kim, Yong-Chul Oh, Byeong-yun Nam +2 more | 2003-06-03 |
| 6531250 | Half-tone phase shift mask having a stepped aperture | — | 2003-03-11 |