Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653228 | Method for preparing semiconductor including formation of contact hole using difluoromethane gas | Tae-hyuk Ahn | 2003-11-25 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6653228 | Method for preparing semiconductor including formation of contact hole using difluoromethane gas | Tae-hyuk Ahn | 2003-11-25 |