Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6579777 | Method of forming local oxidation with sloped silicon recess | Ting-Pwu Yen, Pamela Trammel, Alexander H. Owens | 2003-06-17 |
| 6576404 | Carbon-doped hard mask and method of passivating structures during semiconductor device fabrication | John Hu, Ana Ley | 2003-06-10 |
| 6559048 | Method of making a sloped sidewall via for integrated circuit structure to suppress via poisoning | Yong-Bae Kim, Kai Zhang | 2003-05-06 |
| 6506670 | Self aligned gate | — | 2003-01-14 |
| 6503840 | Process for forming metal-filled openings in low dielectric constant dielectric material while inhibiting via poisoning | Wilbur G. Catabay, Wei-Jen Hsia, Hong-Qiang Lu, Yong-Bae Kim, Kiran Kumar +2 more | 2003-01-07 |