Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6518193 | Substrate processing system | Zhihai Wang, Rudy Rios, Wilbur G. Catabay, Richard Schinella | 2003-02-11 |
| 6503840 | Process for forming metal-filled openings in low dielectric constant dielectric material while inhibiting via poisoning | Wilbur G. Catabay, Wei-Jen Hsia, Hong-Qiang Lu, Yong-Bae Kim, Kai Zhang +2 more | 2003-01-07 |