Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6566262 | Method for creating self-aligned alloy capping layers for copper interconnect structures | Paul Rissman, Sheldon Aronowitz, Vladimir Zubkov | 2003-05-20 |
| 6532585 | Method and apparatus for application of proximity correction with relative segmentation | Dusan Petranovic, Ranko Scepanovic, Edwin Jones, Nicholas F. Pasch, Mario Garza +3 more | 2003-03-11 |
| 6518193 | Substrate processing system | Kiran Kumar, Zhihai Wang, Rudy Rios, Wilbur G. Catabay | 2003-02-11 |
| 6503840 | Process for forming metal-filled openings in low dielectric constant dielectric material while inhibiting via poisoning | Wilbur G. Catabay, Wei-Jen Hsia, Hong-Qiang Lu, Yong-Bae Kim, Kiran Kumar +2 more | 2003-01-07 |