Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6649219 | Process for forming a low dielectric constant fluorine and carbon-containing silicon oxide dielectric material characterized by improved resistance to oxidation | Vladimir Zubkov | 2003-11-18 |
| 6627556 | Method of chemically altering a silicon surface and associated electrical devices | Vladimir Zubkov | 2003-09-30 |
| 6613651 | Integrated circuit isolation system | Helmut Puchner | 2003-09-02 |
| 6572925 | Process for forming a low dielectric constant fluorine and carbon containing silicon oxide dielectric material | Vladimir Zubkov | 2003-06-03 |
| 6566262 | Method for creating self-aligned alloy capping layers for copper interconnect structures | Paul Rissman, Richard Schinella, Vladimir Zubkov | 2003-05-20 |
| 6511925 | Process for forming high dielectric constant gate dielectric for integrated circuit structure | Vladimir Zubkov, Helmut Puchner | 2003-01-28 |