Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6576404 | Carbon-doped hard mask and method of passivating structures during semiconductor device fabrication | Ana Ley, Philippe Schoenborn | 2003-06-10 |
| 6559033 | Processing for forming integrated circuit structure with low dielectric constant material between closely spaced apart metal lines | Kai Zhang, Senthil Arthanari, Hong-Qiang Lu | 2003-05-06 |