Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6576404 | Carbon-doped hard mask and method of passivating structures during semiconductor device fabrication | John Hu, Philippe Schoenborn | 2003-06-10 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6576404 | Carbon-doped hard mask and method of passivating structures during semiconductor device fabrication | John Hu, Philippe Schoenborn | 2003-06-10 |