Issued Patents 2003
Showing 1–8 of 8 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667804 | Temperature compensation method for wavemeters | — | 2003-12-23 |
| 6603789 | Narrow band excimer or molecular fluorine laser with improved beam parameters | — | 2003-08-05 |
| 6577665 | Molecular fluorine laser | Klaus Vogler | 2003-06-10 |
| 6570901 | Excimer or molecular fluorine laser having lengthened electrodes | Uwe Stamm, Igor Bragin | 2003-05-27 |
| 6567451 | Narrow band excimer or molecular fluorine laser having an output coupling interferometer | Peter Lokai | 2003-05-20 |
| 6563853 | Gas performance control system for gas discharge lasers | Peter Heist, Matthias Kramer, Sergei V. Govorkov, Marcus Serwazi, Thomas Jünemann | 2003-05-13 |
| 6553050 | Narrow band excimer or molecular fluorine laser having an output coupling interferometer | Peter Lokai | 2003-04-22 |
| 6516012 | Narrow band excimer or molecular fluorine laser having an output coupling interferometer | Peter Lokai | 2003-02-04 |