Issued Patents 2003
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6650679 | Preionization arrangement for gas laser | Igor Bragin, Ulrich Rebhan, Dirk Basting | 2003-11-18 |
| 6618422 | Preionization arrangement for a gas laser | Igor Bragin, Ulrich Rebhan, Dirk Basting | 2003-09-09 |
| 6618403 | Method and apparatus for compensation of beam property drifts detected by measurement systems outside of an excimer laser | Hans-Stephan Albrecht, Guenter Nowinsk | 2003-09-09 |
| 6608848 | Method and apparatus for wavelength calibration | Jürgen Kleinschmidt, Klaus Vogler, Peter Lokai | 2003-08-19 |
| 6603788 | Resonator for single line selection | Klaus Vogler | 2003-08-05 |
| 6570901 | Excimer or molecular fluorine laser having lengthened electrodes | Juergen Kleinschmidt, Igor Bragin | 2003-05-27 |
| 6560254 | Line-narrowing module for high power laser | — | 2003-05-06 |
| 6556609 | Discharge unit for a high repetition rate excimer or molecular fluorine laser | Igor Bragin, Vadim Berger, Ulrich Rebhan | 2003-04-29 |
| 6546037 | Molecular fluorine laser with spectral linewidth of less than 1 pm | Sergei V. Govorkov | 2003-04-08 |
| 6516013 | Laser beam monitoring apparatus and method | Rainer Patzel | 2003-02-04 |