Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6650679 | Preionization arrangement for gas laser | Ulrich Rebhan, Uwe Stamm, Dirk Basting | 2003-11-18 |
| 6618422 | Preionization arrangement for a gas laser | Ulrich Rebhan, Uwe Stamm, Dirk Basting | 2003-09-09 |
| 6570901 | Excimer or molecular fluorine laser having lengthened electrodes | Uwe Stamm, Juergen Kleinschmidt | 2003-05-27 |
| 6556609 | Discharge unit for a high repetition rate excimer or molecular fluorine laser | Vadim Berger, Uwe Stamm, Ulrich Rebhan | 2003-04-29 |
| 6546036 | Roof configuration for laser discharge electrodes | Vadim Berger | 2003-04-08 |