Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624424 | VUV laser beam characterization system | Gerd Eckert, Klaus Mann | 2003-09-23 |
| 6608848 | Method and apparatus for wavelength calibration | Jürgen Kleinschmidt, Uwe Stamm, Peter Lokai | 2003-08-19 |
| 6603788 | Resonator for single line selection | Uwe Stamm | 2003-08-05 |
| 6577665 | Molecular fluorine laser | Juergen Kleinschmidt | 2003-06-10 |
| 6577663 | Narrow bandwidth oscillator-amplifier system | — | 2003-06-10 |
| 6526085 | Performance control system and method for gas discharge lasers | Peter Heist | 2003-02-25 |
| 6504861 | Laser gas replenishment method | Hans-Stephan Albrecht, Thomas Schroeder | 2003-01-07 |