Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6563853 | Gas performance control system for gas discharge lasers | Matthias Kramer, Juergen Kleinschmidt, Sergei V. Govorkov, Marcus Serwazi, Thomas Jünemann | 2003-05-13 |
| 6556613 | F2-laser with line selection | Jürgen Kleinschmidt, Frank Voss, Andreas Görtler | 2003-04-29 |
| RE38039 | Laser for generating narrow-band radiation | Jürgen Kleinschmidt | 2003-03-18 |
| 6526085 | Performance control system and method for gas discharge lasers | Klaus Vogler | 2003-02-25 |