Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6556613 | F2-laser with line selection | Jürgen Kleinschmidt, Peter Heist, Andreas Görtler | 2003-04-29 |
| 6533266 | Transportation device for deflecting flat consignments | Holger Schererz, Matthias Prasser | 2003-03-18 |
| 6529533 | Beam parameter monitoring unit for a molecular fluorine (F2) laser | — | 2003-03-04 |
| 6526084 | Detection of F2-concentration for power stabilization of an F2-157 NM excimer laser by using red laser emission of F-atom | — | 2003-02-25 |