Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6563853 | Gas performance control system for gas discharge lasers | Peter Heist, Matthias Kramer, Juergen Kleinschmidt, Sergei V. Govorkov, Marcus Serwazi | 2003-05-13 |
| 6549555 | Gas performance control system for gas discharge lasers | Marcus Serwazi | 2003-04-15 |