Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6608848 | Method and apparatus for wavelength calibration | Jürgen Kleinschmidt, Uwe Stamm, Klaus Vogler | 2003-08-19 |
| 6580517 | Absolute wavelength calibration of lithography laser using multiple element or tandem see through hollow cathode lamp | Thomas Schroeder | 2003-06-17 |
| 6567451 | Narrow band excimer or molecular fluorine laser having an output coupling interferometer | Juergen Kleinschmidt | 2003-05-20 |
| 6553050 | Narrow band excimer or molecular fluorine laser having an output coupling interferometer | Juergen Kleinschmidt | 2003-04-22 |
| 6516012 | Narrow band excimer or molecular fluorine laser having an output coupling interferometer | Juergen Kleinschmidt | 2003-02-04 |