Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6626968 | Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same | Young-rae Park, Bo-Un Yoon, Kwang-bok Kim, Jae-Phil Boo, Jong Won Lee +3 more | 2003-09-30 |
| 6585570 | Method and apparatus for supplying chemical-mechanical polishing slurries | Young-rae Park, Sang-rok Hah | 2003-07-01 |
| 6548388 | Semiconductor device including gate electrode having damascene structure and method of fabricating the same | Hong-kyu Hwang, Young-rae Park, Jeong-sic Jeon, Bo-Un Yoon, Sang-rok Hah | 2003-04-15 |
| 6537914 | Integrated circuit device isolation methods using high selectivity chemical-mechanical polishing | Tai-Su Park, Moon-han Park, Kyung Won Park, Han-Sin Lee, Chang-Ki Hong +1 more | 2003-03-25 |
| 6518157 | Methods of planarizing insulating layers on regions having different etching rates | Gee-won Nam, Gi-jong Park, Hong-kyu Hwang, Jun-Shik Bae, Young-rae Park +2 more | 2003-02-11 |