Issued Patents 2003
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6626968 | Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same | Young-rae Park, Jung-yup Kim, Kwang-bok Kim, Jae-Phil Boo, Jong Won Lee +3 more | 2003-09-30 |
| 6610596 | Method of forming metal interconnection using plating and semiconductor device manufactured by the method | Jong Won Lee, Kun-Tack Lee, Sang-rok Hah | 2003-08-26 |
| 6548388 | Semiconductor device including gate electrode having damascene structure and method of fabricating the same | Hong-kyu Hwang, Young-rae Park, Jung-yup Kim, Jeong-sic Jeon, Sang-rok Hah | 2003-04-15 |
| 6517412 | Method of controlling wafer polishing time using sample-skip algorithm and wafer polishing using the same | Jae-Dong Lee, Kyoung-mo Yang, Sang-rok Hah | 2003-02-11 |
| 6518157 | Methods of planarizing insulating layers on regions having different etching rates | Gee-won Nam, Gi-jong Park, Hong-kyu Hwang, Jun-Shik Bae, Young-rae Park +2 more | 2003-02-11 |
| 6514862 | Wafer polishing slurry and chemical mechanical polishing (CMP) method using the same | Jae-Dong Lee, Jong Won Lee, Sang-rok Hah | 2003-02-04 |