Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6652362 | Apparatus for polishing a semiconductor wafer and method therefor | Jun-Gyu Ryu, Sang-Seon Lee, Sun-Wung Lee | 2003-11-25 |
| 6626968 | Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same | Young-rae Park, Jung-yup Kim, Bo-Un Yoon, Kwang-bok Kim, Jong Won Lee +3 more | 2003-09-30 |