Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6626968 | Slurry for chemical mechanical polishing process and method of manufacturing semiconductor device using the same | Young-rae Park, Jung-yup Kim, Bo-Un Yoon, Kwang-bok Kim, Jae-Phil Boo +3 more | 2003-09-30 |
| 6610596 | Method of forming metal interconnection using plating and semiconductor device manufactured by the method | Bo-Un Yoon, Kun-Tack Lee, Sang-rok Hah | 2003-08-26 |
| 6579631 | Electroluminescence device and method for manufacturing the same | — | 2003-06-17 |
| 6569705 | Metal structure for a phase-change memory device | Chien Chiang, Patrick Klersy | 2003-05-27 |
| 6540935 | Chemical/mechanical polishing slurry, and chemical mechanical polishing process and shallow trench isolation process employing the same | Jae-Dong Lee, Bo Yoon, Sang-rok Hah | 2003-04-01 |
| 6514862 | Wafer polishing slurry and chemical mechanical polishing (CMP) method using the same | Jae-Dong Lee, Bo-Un Yoon, Sang-rok Hah | 2003-02-04 |
| 6506682 | Non-selective slurries for chemical mechanical polishing of metal layers and method for manufacturing thereof | Sang-rok Hah | 2003-01-14 |