Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6540935 | Chemical/mechanical polishing slurry, and chemical mechanical polishing process and shallow trench isolation process employing the same | Jong Won Lee, Bo Yoon, Sang-rok Hah | 2003-04-01 |
| 6517412 | Method of controlling wafer polishing time using sample-skip algorithm and wafer polishing using the same | Bo-Un Yoon, Kyoung-mo Yang, Sang-rok Hah | 2003-02-11 |
| 6518115 | CMOS image sensor and method for fabricating the same | Sang-Joo Lee | 2003-02-11 |
| 6514862 | Wafer polishing slurry and chemical mechanical polishing (CMP) method using the same | Jong Won Lee, Bo-Un Yoon, Sang-rok Hah | 2003-02-04 |