Issued Patents 2003
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6645866 | Method of fabricating a semiconductor device using trench isolation method including hydrogen annealing step | Kyung Won Park, Jung-Woo Park, Won-sang Song | 2003-11-11 |
| 6627514 | Semiconductor device having a Y-shaped isolation layer and simplified method for manufacturing the Y-shaped isolation layer to prevent divot formation | Kyung Won Park, Sung Jin Kim | 2003-09-30 |
| 6617662 | Semiconductor device having a trench isolation structure | — | 2003-09-09 |
| 6537914 | Integrated circuit device isolation methods using high selectivity chemical-mechanical polishing | Moon-han Park, Kyung Won Park, Han-Sin Lee, Jung-yup Kim, Chang-Ki Hong +1 more | 2003-03-25 |
| 6511888 | Method of fabricating a semiconductor device using trench isolation method including hydrogen annealing step | Kyung Won Park, Jung-Woo Park, Won-sang Song | 2003-01-28 |