Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624041 | Method for forming trench type isolation film using annealing | Soo-Jin Hong | 2003-09-23 |
| 6566229 | Method of forming an insulating layer in a trench isolation type semiconductor device | Soo-Jin Hong, Ju-Seon Goo, Jin-Hwa Heo, Hong-Gun Kim, Eun-Kee Hong | 2003-05-20 |
| 6537914 | Integrated circuit device isolation methods using high selectivity chemical-mechanical polishing | Tai-Su Park, Kyung Won Park, Han-Sin Lee, Jung-yup Kim, Chang-Ki Hong +1 more | 2003-03-25 |