Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6624041 | Method for forming trench type isolation film using annealing | Moon-han Park | 2003-09-23 |
| 6593207 | Method of forming a trench device isolation structure with upper liner pattern | Jin-Hwa Heo | 2003-07-15 |
| 6583025 | Method of forming a trench isolation structure comprising annealing the oxidation barrier layer thereof in a furnace | — | 2003-06-24 |
| 6566229 | Method of forming an insulating layer in a trench isolation type semiconductor device | Moon-han Park, Ju-Seon Goo, Jin-Hwa Heo, Hong-Gun Kim, Eun-Kee Hong | 2003-05-20 |