Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667253 | Alignment mark and exposure alignment system and method using the same | Seong-II Kim, Sang-II Han, Chang-Hoon Lee, Choung-Hee Kim | 2003-12-23 |
| 6645866 | Method of fabricating a semiconductor device using trench isolation method including hydrogen annealing step | Tai-Su Park, Kyung Won Park, Jung-Woo Park | 2003-11-11 |
| 6580134 | Field effect transistors having elevated source/drain regions | Jung-Woo Park, Gil-Gwang Lee, Tae-Hee Choe | 2003-06-17 |
| 6511888 | Method of fabricating a semiconductor device using trench isolation method including hydrogen annealing step | Tai-Su Park, Kyung Won Park, Jung-Woo Park | 2003-01-28 |