Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660330 | Method for depositing metal films onto substrate surfaces utilizing a chamfered ring support | Peter S. Locke, Sandra G. Malhotra, Andrew H. Simon, John J. Yurkas | 2003-12-09 |
| 6603181 | MOS device having a passivated semiconductor-dielectric interface | Paul M. Solomon, Douglas A. Buchanan, Eduard A. Cartier, Kathryn Guarini, Huiling Shang +1 more | 2003-08-05 |
| 6579614 | Structure having refractory metal film on a substrate | Kevin K. Chan, Erin C. Jones, Paul M. Solomon, John J. Yurkas | 2003-06-17 |
| 6566281 | Nitrogen-rich barrier layer and structures formed | Douglas A. Buchanan, Matthew W. Copel, Patrick R. Varekamp, Mark Monroe Banaszak Holl, Kyle Erik Litz | 2003-05-20 |