Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660330 | Method for depositing metal films onto substrate surfaces utilizing a chamfered ring support | Peter S. Locke, Sandra G. Malhotra, Fenton R. McFeely, Andrew H. Simon | 2003-12-09 |
| 6579614 | Structure having refractory metal film on a substrate | Kevin K. Chan, Erin C. Jones, Fenton R. McFeely, Paul M. Solomon | 2003-06-17 |