Issued Patents 2003
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6660330 | Method for depositing metal films onto substrate surfaces utilizing a chamfered ring support | Sandra G. Malhotra, Fenton R. McFeely, Andrew H. Simon, John J. Yurkas | 2003-12-09 |
| 6627052 | Electroplating apparatus with vertical electrical contact | James E. Fluegel, Yuet-Ying Yu | 2003-09-30 |
| 6600230 | Seedlayer for plating metal in deep submicron structures | Cyprian Emeka Uzoh | 2003-07-29 |
| 6592747 | Method of controlling additives in copper plating baths | Wilma Jean Horkans, Keith Kwietniak | 2003-07-15 |