Issued Patents 2003
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6566281 | Nitrogen-rich barrier layer and structures formed | Douglas A. Buchanan, Matthew W. Copel, Fenton R. McFeely, Patrick R. Varekamp, Kyle Erik Litz | 2003-05-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6566281 | Nitrogen-rich barrier layer and structures formed | Douglas A. Buchanan, Matthew W. Copel, Fenton R. McFeely, Patrick R. Varekamp, Kyle Erik Litz | 2003-05-20 |