Issued Patents 2003
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6667207 | High-dielectric constant insulators for FEOL capacitors | Arne Ballantine, Douglas A. Buchanan, Douglas D. Coolbaugh, Evgeni Gousev, Harald Okorn-Schmidt | 2003-12-23 |
| 6602772 | Method for non-contact stress evaluation of wafer gate dielectric reliability | Wagdi W. Abadeer, James H. Stathis | 2003-08-05 |
| 6603181 | MOS device having a passivated semiconductor-dielectric interface | Paul M. Solomon, Douglas A. Buchanan, Kathryn Guarini, Fenton R. McFeely, Huiling Shang +1 more | 2003-08-05 |
| 6541079 | Engineered high dielectric constant oxide and oxynitride heterostructure gate dielectrics by an atomic beam deposition technique | Nestor A. Bojarczuk, Supratik Guha | 2003-04-01 |
| 6528374 | Method for forming dielectric stack without interfacial layer | Nestor A. Bojarczuk, Matthew W. Copel, Supratik Guha | 2003-03-04 |
| 6521977 | Deuterium reservoirs and ingress paths | Jay Burnham, Thomas G. Ference, Steven W. Mittl, Anthony K. Stamper | 2003-02-18 |
| 6511873 | High-dielectric constant insulators for FEOL capacitors | Arne Ballantine, Douglas A. Buchanan, Douglas D. Coolbaugh, Evgeni Gousev, Harald Okorn-Schmidt | 2003-01-28 |