Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6541079 | Engineered high dielectric constant oxide and oxynitride heterostructure gate dielectrics by an atomic beam deposition technique | Eduard A. Cartier, Supratik Guha | 2003-04-01 |
| 6528374 | Method for forming dielectric stack without interfacial layer | Eduard A. Cartier, Matthew W. Copel, Supratik Guha | 2003-03-04 |