Issued Patents 2003
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6668676 | Transmission | Shigeru Koyama | 2003-12-30 |
| 6661984 | Image forming apparatus | — | 2003-12-09 |
| 6639221 | Annular illumination method for charged particle projection optics | — | 2003-10-28 |
| 6630681 | Charged-particle-beam microlithography apparatus and methods including correction of aberrations caused by space-charge effects | — | 2003-10-07 |
| 6596999 | High performance source for electron beam projection lithography | Steven D. Golladay, Michael S. Gordon, Rodney A. Kendall, Werner Stickel | 2003-07-22 |
| 6573014 | Charged-particle-beam microlithography methods for exposing a segmented reticle | Takeshi Yamaguchi | 2003-06-03 |
| 6566663 | Charged-particle-beam optical components and systems including ferrite exhibiting reduced image displacement from temperature fluctuations | Koichi Kamijo, Katsushi Nakano, Kazuya Okamoto | 2003-05-20 |
| 6541169 | Methods for charged-particle-beam microlithography including correction of deflection aberrations, and device-manufacturing methods comprising same | Teruaki Okino | 2003-04-01 |
| 6508735 | Hydraulic control system for transmissions | Akira Murakami, Masanori Ohtake | 2003-01-21 |
| 6507027 | Apparatus and methods for charged-particle-beam microlithography exhibiting reduced four-fold aberrations | Koichi Kamijo | 2003-01-14 |