Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6639219 | Electron scatter in a thin membrane to eliminate detector saturation | Christopher F. Robinson | 2003-10-28 |
| 6596999 | High performance source for electron beam projection lithography | Steven D. Golladay, Michael S. Gordon, Shinichi Kojima, Werner Stickel | 2003-07-22 |
| 6588090 | Fabrication method of high precision, thermally stable electromagnetic coil vanes | David A. Pickney | 2003-07-08 |