Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6639219 | Electron scatter in a thin membrane to eliminate detector saturation | Rodney A. Kendall | 2003-10-28 |
| 6573514 | Method for aligning electron beam projection lithography tool | Michael S. Gordon, Jon E. Lieberman | 2003-06-03 |
| 6541783 | Stencil reticle incorporating scattering features for electron beam projection lithography | Werner Stickel | 2003-04-01 |