Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6617585 | Optimized curvilinear variable axis lens doublet for charged particle beam projection system | — | 2003-09-09 |
| 6596999 | High performance source for electron beam projection lithography | Steven D. Golladay, Michael S. Gordon, Rodney A. Kendall, Shinichi Kojima | 2003-07-22 |
| 6541783 | Stencil reticle incorporating scattering features for electron beam projection lithography | Christopher F. Robinson | 2003-04-01 |