Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6596999 | High performance source for electron beam projection lithography | Michael S. Gordon, Rodney A. Kendall, Shinichi Kojima, Werner Stickel | 2003-07-22 |
| 6590216 | Servo control for high emittance electron source | Samuel K. Doran | 2003-07-08 |