Issued Patents 2003
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6635891 | Hollow-beam apertures for charged-particle-beam microlithography apparatus and methods for making and using same | Junji Nakamura | 2003-10-21 |
| 6566663 | Charged-particle-beam optical components and systems including ferrite exhibiting reduced image displacement from temperature fluctuations | Koichi Kamijo, Shinichi Kojima, Kazuya Okamoto | 2003-05-20 |