Issued Patents 2003
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 6664551 | Methods for detecting incidence orthogonality of a patterned beam in charged-particle-beam (CPB) microlithography, and CPB microlithography systems that perform same | — | 2003-12-16 |
| 6657207 | Charged-particle-beam microlithography apparatus and methods including optical corrections made during subfield exposures | Shintaro Kawata, Kazuaki Suzuki, Noriyuki Hirayanagi | 2003-12-02 |
| 6541169 | Methods for charged-particle-beam microlithography including correction of deflection aberrations, and device-manufacturing methods comprising same | Shinichi Kojima | 2003-04-01 |